Transfer method of functional device and functional panel

機能素子の転写方法および機能性パネル

Abstract

(57)【要約】 【課題】 機能素子の性能を低下させることなく、機能 素子を形成する基板と製品として使用する際に用いる基 板とを個別に選択することを可能にする機能素子の転写 方法および機能パネルを提供する。 【解決手段】 ガラス基板1上に酸化タンタルのバリア 層2とTFTからなる機能素子層3とを形成して機能素 子基板を形成し、機能素子層3の表面に樹脂をスピンコ ートした後硬化させ保護層4を形成する。フッ酸の水溶 液から成るエッチング液を用いてガラス基板1の裏面か らエッチングを行うことで、ガラス基板1が除去されて バリア層2および機能素子層3からなる薄層化された機 能素子基板が得られる。薄層化した機能素子基板のバリ ア層2と有機高分子から成る転写体6とを樹脂からなる 接着層5を介して貼合わせ、機能素子層3をガラス基板 1から転写体6に転写する。
PROBLEM TO BE SOLVED: To provide a transfer method of a functional device which can select a substrate for forming the functional device and a substrate used when the functional device is applied to an actual product individually and to provide a functional panel. SOLUTION: A barrier layer 2 made of tantalum oxide and a functional device layer 3 made of TFT are formed on a glass substrate 1 to form a functional device substrate. The surface of the functional device layer 3 is coated with a resin by spin-coating, and then the resin is cured to form a protective layer 4. The glass substrate 1 is etched from its rear surface with an etchant comprising a solution of fluoric acid to remove the glass substrate 1 and a thin layer functional device substrate comprising the barrier layer 2 and the functional device layer 3 is obtained. A transfer element 6 made of organic polymer is bonded to the barrier layer 2 of the thin layer functional device substrate with an adhesive layer 5 and the functional device layer 3 is transferred from the glass substrate 1 to the transfer element 6. COPYRIGHT: (C)2002,JPO

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